ASML Denies EUV Lithography Machines Reached China; U.S. Officials Claim Evidence but Refuse to Disclose
N.R. Finch
U.S. Commerce Secretary Howard Lutnick confronted ASML executives in April, alleging the company's top-tier EUV lithography machines — the tools that etch the most advanced chip circuits — may have reached China in violation of export controls. ASML flatly denied it; Washington refused to produce evidence. The standoff could reshape global chip-equipment export policy.
What exactly is Washington alleging?
According to Bloomberg, Lutnick raised the issue directly with ASML executives in a series of April meetings: EUV machines may have reached China in breach of export controls.
Multiple anonymous senior U.S. officials told Bloomberg they have evidence ASML has "not acted in good faith," including exports to China of specialized equipment designed to transport EUV machines and other components usable in EUV systems.
The critical gap: U.S. officials refused to disclose the evidence and did not say whether they possess proof that a complete EUV machine is inside China. This means → the accusation sits in a zone where it can be neither confirmed nor refuted — "we have evidence but can't show you."
How did ASML respond?
An ASML spokesperson stated the company has "never shipped a single EUV lithography machine to China" and said it has repeatedly rejected what it called unfounded compliance rumors.
An internal ASML document obtained by Bloomberg shows 314 EUV machines currently in operation and 26 decommissioned worldwide — none in China.
ASML also pointed to two layers of technical safeguards: its systems can automatically detect any disruption, anomalous behavior, or connectivity loss, and customers "cannot remove, transport, and relocate an EUV system without ASML's involvement." In plain terms = ASML is saying these machines are monitored from transport to network connection — moving one covertly is near-impossible.
How is ASML treating this internally?
People familiar with the matter said ASML has entered "crisis mode" internally.
After the meetings, ASML began circulating a document in Washington titled "No Indication of ASML EUV Systems in China."
This reflects a company treating the allegations not as routine trade friction but as a serious threat to its reputation and compliance record — one that demands an active defense.
What does this mean for the bigger picture?
Lutnick and ASML CEO Christophe Fouquet both described their meetings in positive terms on LinkedIn, but neither mentioned the EUV issue. This means → both sides are deliberately avoiding public confrontation while the private standoff persists.
The Dutch foreign ministry responded that the Netherlands takes seriously the responsibilities that come with its "unique position" in the semiconductor industry and enforces "very strict" restrictions on EUV exports.
The largest uncertainty remains: no one knows what Washington actually needs to end the dispute. If the standoff continues, it will weigh on ASML — one of Europe's most valuable companies — and risk further straining an already tense U.S.–Europe relationship.
Content is for reference only, not financial advice.